-Novel insights into fundamental relationships between dielectric constant and the breakdown field of materials and related capacitance density and breakdown voltage of capacitor structures,
-Electrical characterization techniques for a wide range of frequencies (1 kHz to 20 GHz),
-Process modeling to determine stable operating points,
-Prevention of metal (Cu) diffusion into the dielectric,
-Measurements and modeling of the dielectric micro-roughness.
Publisher: Springer-Verlag New York Inc.
Number of pages: 158
Weight: 950 g
Dimensions: 235 x 155 x 11 mm
Edition: 2004 ed.
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