Symposium on VLSI Technology 2000 (CD-ROM)Institute of Electrical and Electronics Engineers (author)
CD-ROM Published: 01/07/2000
- Not available
These conference prodeedings cover such topics as: copper interconnects; novel devices; high-K dielectrics; process technology; embedded DRAM; gate electrode engineering; DRAM cells; gate oxide scaling and reliability; DRAM capacitors; and high performance RF.
Edition: 2000 ed.
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