Statistical Metrology: 3rd International Workshop (Paperback)IEEE Electron Devices Society (author)
Paperback 130 Pages / Published: 01/07/1998
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This workshop focused on issues such as the generalization and utilization of statistically significant measurements to characterise and validate VLSI processes, designs and equipment operations. Papers discuss areas including yield ramping methodology in pre-produciton phase.
Number of pages: 130
Dimensions: 279 x 216 mm
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