Silicon-on-Insulator Technology: Materials to VLSI: Materials to VLSI (Hardback)Jean-Pierre Colinge (author)
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This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis.
Publisher: Springer-Verlag New York Inc.
Number of pages: 366
Weight: 1580 g
Dimensions: 235 x 155 x 22 mm
Edition: 3rd ed. 2004
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