• Sign In / Register
  • Help
  • Basket0
Silicon Materials-Processing, Characterization and Reliability: Volume 716 - MRS Proceedings (Paperback)
  • Silicon Materials-Processing, Characterization and Reliability: Volume 716 - MRS Proceedings (Paperback)
zoom

Silicon Materials-Processing, Characterization and Reliability: Volume 716 - MRS Proceedings (Paperback)

(editor), (editor), (editor), (editor), (editor), (editor)
£22.00
Paperback Published: 05/06/2014
  • Not available

This product is currently unavailable.

  • This item has been added to your basket
This book provides a solid look into the technical status of the semiconductor industry. The evolution of transistors to miniaturization beyond the capabilities of conventional IC processing has created a need for materials research in many levels of the integrated circuit fabrication, including new materials in substrates, gates and interconnects. The transition from silicon-based chemistries to alternative materials shows the unique properties of silicon that have permitted the dramatic progress in semiconductor device advancement in the past. New materials and techniques to process and evaluate materials will be required to extend device advancements, with the constraint of commercial viability. This book brings together the research and development to provide a view of the manufacturing industry. Topics include: silicon materials and processing; gate dielectrics and devices; high-k dielectrics; dielectric characterization; gate oxides and interfaces; metals and interfaces; characterization using surface analysis techniques; oxides and silicides; metals and modeling; low-k dielectrics and reliability.

Publisher: Cambridge University Press
ISBN: 9781107411937
Weight: 920 g
Dimensions: 229 x 152 x 35 mm

You may also be interested in...

Hydraulics and Pneumatics
Added to basket
Mathematical Methods in Engineering
Added to basket
Mechanics of Fluids, Ninth Edition
Added to basket
Mechanics of Materials For Dummies
Added to basket
Fluid Mechanics
Added to basket
£53.99
Paperback
The Simple Science of Flight
Added to basket
Reinforced Concrete Design
Added to basket
Model Aircraft Aerodynamics
Added to basket
Computational Hydraulics
Added to basket
Thermodynamics for Dummies
Added to basket
The Oxford Solid State Basics
Added to basket
Fluid Mechanics DeMYSTiFied
Added to basket
Engineering Materials 1
Added to basket

Reviews

Please sign in to write a review

Your review has been submitted successfully.