• Sign In / Register
  • Help
  • Basket0
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures (Paperback)
  • Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures (Paperback)
zoom

Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures (Paperback)

(author)
£89.99
Paperback 222 Pages / Published: 13/10/2010
  • We can order this

Usually despatched within 3 weeks

  • This item has been added to your basket
The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gartner, Steffi Kronert and Cornelia Kowol were directly involved. All the SEM pictures result from preparations performed at the Centre of - crotechnologies at the Chemnitz University of Technology (Head: Prof. Thomas Gessner). The author and his coworkers wish to express their thanks to Wolfgang Brauer (mask design), Norbert Zichner (processes), Iris Hobelt (SEM pictures) and the student Karin Preissler (manuscript layout support). In particular thanks are due to the Stiftung Industrieforschung for the financial support and to the Springer V- lag for the edition of this manual.

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN: 9783642060489
Number of pages: 222
Weight: 367 g
Dimensions: 235 x 155 x 13 mm
Edition: Softcover reprint of hardcover 1st ed. 2005

You may also be interested in...

Industrial Electrical Troubleshooting
Added to basket
Electronics For Dummies
Added to basket
Robotics: A Very Short Introduction
Added to basket
Getting Started with Arduino
Added to basket
Make: More Electronics
Added to basket
Exploring Arduino
Added to basket
£27.99
Paperback
Electronics All-in-one For Dummies
Added to basket
Electronic Circuits, 4th ed
Added to basket
Arduino For Dummies
Added to basket
£16.99
Paperback
Arduino Projects for Amateur Radio
Added to basket
Encyclopedia of Electronic Components
Added to basket
Arduino Projects For Dummies
Added to basket

Reviews

Please sign in to write a review

Your review has been submitted successfully.