For the introductory course in Semiconductor Manufacturing Technology.
This text introduces the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications.
Publisher: Pearson Education (US)
Number of pages: 666
Weight: 1618 g
Dimensions: 300 x 217 x 31 mm
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