Rapid Thermal Processing of Semiconductors - Microdevices (Paperback)
  • Rapid Thermal Processing of Semiconductors - Microdevices (Paperback)
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Rapid Thermal Processing of Semiconductors - Microdevices (Paperback)

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£129.99
Paperback 358 Pages / Published: 20/06/2013
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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Publisher: Springer-Verlag New York Inc.
ISBN: 9781489918062
Number of pages: 358
Weight: 587 g
Dimensions: 235 x 155 x 20 mm
Edition: Softcover reprint of the original 1st ed. 199

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