Visit our Christmas Gift Finder
Click & Collect from 2 Hours*
Last Christmas delivery dates
Free UK Standard Delivery On all orders £20 and over Order in time for Christmas 19th December 2nd Class | 20th December 1st Class Free Click & Collect to UK shops From 2 hours of your order*
Rapid Thermal and Integrated Processing IV: Volume 387 - MRS Proceedings (Hardback)
  • Rapid Thermal and Integrated Processing IV: Volume 387 - MRS Proceedings (Hardback)
zoom

Rapid Thermal and Integrated Processing IV: Volume 387 - MRS Proceedings (Hardback)

(editor), (editor), (editor), (editor), (editor)
£20.99
Hardback 455 Pages / Published: 27/10/1995
  • We can order this

Usually dispatched within 3 weeks

  • This item has been added to your basket
The fourth in a continuing series on rapid thermal processing (RTP), this volume addresses work in traditional RTP processes such as dielectric growth, annealing and silicides, as well as developments in integrated processes. The primary focus, however, is the manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs. Emphasis is placed on process and equipment modelling and the critical aspects of RTP, such as temperature measurement, uniformity and control. Topics include: modelling, sensors and control; integrated processing and manufacturing; dielectrics; epitaxy, polysilicon and devices; and junctions, metallization and contacts.

Publisher: Materials Research Society
ISBN: 9781558992900
Number of pages: 455
Weight: 795 g
Dimensions: 231 x 160 x 30 mm

You may also be interested in...

Theory of Wing Sections
Added to basket
Stuff Matters
Added to basket
£9.99
Paperback
A Dictionary of Chemical Engineering
Added to basket
Mechanics of Materials For Dummies
Added to basket
Composite Materials
Added to basket
£20.00
Paperback
Engineering Thermodynamics
Added to basket
Thermodynamics For Dummies
Added to basket
Mechanics
Added to basket
£53.99
Paperback
Materials Science and Engineering
Added to basket
Fluid Mechanics
Added to basket
£55.99
Paperback
Hydraulics and Pneumatics
Added to basket
Engineering Materials
Added to basket
Materials: A Very Short Introduction
Added to basket

Please sign in to write a review

Your review has been submitted successfully.