Principles of Lithography - Press Monographs (Paperback)
  • Principles of Lithography - Press Monographs (Paperback)

Principles of Lithography - Press Monographs (Paperback)

Paperback 526 Pages / Published: 30/03/2011
  • Not available

This product is currently unavailable

This product is currently unavailable.

  • This item has been added to your basket

The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices.

This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well.

Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Publisher: SPIE Press
ISBN: 9780819483249
Number of pages: 526
Dimensions: 229 x 152 mm
Edition: 3rd Revised edition

You may also be interested in...

Robotics: A Very Short Introduction
Added to basket
Encyclopedia of Electronic Components
Added to basket
The Lego Mindstorms Ev3 Idea Book
Added to basket
The Superhet Radio Handbook
Added to basket
Make: More Electronics
Added to basket
Make: Analog Synthesizers
Added to basket
Drones For Dummies
Added to basket
Arduino in Easy Steps
Added to basket
The Secret Wireless War
Added to basket
Electronics For Dummies
Added to basket
Getting Started with Arduino
Added to basket
Arduino Projects For Dummies
Added to basket
Arduino Cookbook
Added to basket

Please sign in to write a review

Your review has been submitted successfully.