Principles of Chemical Vapor Deposition (Hardback)
  • Principles of Chemical Vapor Deposition (Hardback)
zoom

Principles of Chemical Vapor Deposition (Hardback)

(author), (author)
£139.99
Hardback 273 Pages / Published: 30/04/2003
  • We can order this

Usually dispatched within 3 weeks

  • This item has been added to your basket

Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment.

This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.

Publisher: Springer-Verlag New York Inc.
ISBN: 9781402012488
Number of pages: 273
Weight: 1290 g
Dimensions: 235 x 155 x 17 mm
Edition: 2003 ed.

You may also be interested in...

Structures
Added to basket
£14.99
Paperback
BTEC National Engineering, 3rd ed
Added to basket
BTEC First in Engineering Student Book
Added to basket
Engineering Fundamentals
Added to basket
The C++ Programming Language
Added to basket
Practical Reverse Engineering
Added to basket
Mathematics for Engineers (with CD)
Added to basket
Verilog by Example
Added to basket
Science for Engineering, 5th ed
Added to basket
The C++ Programming Language
Added to basket
MATLAB Demystified
Added to basket
£21.99
Paperback
Engineering
Added to basket
£9.99
Paperback

Reviews

Please sign in to write a review

Your review has been submitted successfully.