Predictive Simulation of Semiconductor Processing: Status and Challenges - Springer Series in Materials Science 72 (Hardback)
  • Predictive Simulation of Semiconductor Processing: Status and Challenges - Springer Series in Materials Science 72 (Hardback)
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Predictive Simulation of Semiconductor Processing: Status and Challenges - Springer Series in Materials Science 72 (Hardback)

(editor), (editor)
£249.99
Hardback 490 Pages / Published: 05/05/2004
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Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN: 9783540204817
Number of pages: 490
Weight: 1024 g
Dimensions: 235 x 155 x 38 mm
Edition: 2004 ed.


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From the reviews:

"This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool. Eleven contributions make up the book; each is supported by a wealth of references. ... A valuable reference and guide to have on the shelf for frequent use and study. Certainly, the expertise and research experience of the contributors cannot be questioned. Summing up ... a richly rewarding work." (Current Engineering Practice, Vol. 47 (3), 2004-2005)

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