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Polymeric Materials for Microelectronic Applications: Science and Technology - ACS Symposium Series 579 (Hardback)
  • Polymeric Materials for Microelectronic Applications: Science and Technology - ACS Symposium Series 579 (Hardback)
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Polymeric Materials for Microelectronic Applications: Science and Technology - ACS Symposium Series 579 (Hardback)

(editor), (editor), (editor)
£39.99
Hardback 540 Pages / Published: 01/01/1995
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Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.

Publisher: American Chemical Society
ISBN: 9780841230552
Number of pages: 540
Weight: 759 g
Dimensions: 235 x 156 x 27 mm

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