Plasma Processing of Semiconductors - Nato Science Series E: 336 (Hardback)
  • Plasma Processing of Semiconductors - Nato Science Series E: 336 (Hardback)
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Plasma Processing of Semiconductors - Nato Science Series E: 336 (Hardback)

(editor)
£382.00
Hardback 613 Pages / Published: 31/05/1997
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Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Publisher: Springer
ISBN: 9780792345671
Number of pages: 613
Weight: 2320 g
Dimensions: 235 x 155 x 33 mm
Edition: 1997 ed.

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