Plasma Processing of Semiconductors - Nato Science Series E: 336 (Hardback)P. F. Williams (editor)
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Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Number of pages: 613
Weight: 2320 g
Dimensions: 235 x 155 x 33 mm
Edition: 1997 ed.
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