Optical Microlithography Xi (Paperback)
  • Optical Microlithography Xi (Paperback)

Optical Microlithography Xi (Paperback)

Paperback 1106 Pages / Published: 31/07/1998
  • We can order this

Usually dispatched within 2 weeks

  • This item has been added to your basket
A study of optical microlithography. It contains papers on subjects such as phase-shifting masks, CD control scanners, process optimization, and advanced masks.

Publisher: SPIE Press
ISBN: 9780819427793
Number of pages: 1106

You may also be interested in...

Introduction to Fiber Optics
Added to basket
Added to basket
Physical Principles of Remote Sensing
Added to basket

Please sign in to write a review

Your review has been submitted successfully.