Optical Microlithography Xi (Paperback)
  • Optical Microlithography Xi (Paperback)
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Optical Microlithography Xi (Paperback)

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£109.00
Paperback 1106 Pages / Published: 31/07/1998
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A study of optical microlithography. It contains papers on subjects such as phase-shifting masks, CD control scanners, process optimization, and advanced masks.

Publisher: SPIE Press
ISBN: 9780819427793
Number of pages: 1106

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