Designed to give a concise but complete overview of the field, this book features contributions written by leading experts in the various areas. Topics include design, materials, film growth, deposition including large area, characterization and monitoring, and mechanical stress.
Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Number of pages: 503
Weight: 1030 g
Dimensions: 229 x 152 x 30 mm
Edition: 2003 ed.
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