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Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies - Nato Science Series E: 264 (Paperback)
  • Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies - Nato Science Series E: 264 (Paperback)
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Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies - Nato Science Series E: 264 (Paperback)

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£207.00
Paperback 216 Pages / Published: 05/12/2010
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Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography.
Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).

Publisher: Springer
ISBN: 9789048143887
Number of pages: 216
Weight: 355 g
Dimensions: 235 x 155 x 12 mm
Edition: Softcover reprint of hardcover 1st ed. 1994

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