Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
Number of pages: 216
Weight: 355 g
Dimensions: 235 x 155 x 12 mm
Edition: Softcover reprint of hardcover 1st ed. 1994