Micromachined Resonant Devices: Design of Micromechanical Devices - MEMS Reference Shelf PREL 230 (Hardback)Zhili Hao (author)
Hardback 400 Pages / Published: 01/02/2009
- Not available
Micromachined resonant devices are of great interest for a wide variety of applications, such as inertial sensing, biological/chemical sensing, projection display, biomedical imaging, wireless communication, and instrumentation in micro/nano-technology. "Micromachined Resonant Devices: Design, Modeling, and Simulation" provides a comprehensive and in-depth description of the design, modeling, and simulation of micromachined resonant devices from basic structural components, integrated transducers, to electromechanical system-level models, and including, Optical MEMS, RF MEMS, BioMEMS, and inertial sensing.
Publisher: Springer-Verlag New York Inc.
Number of pages: 400
You may also be interested in...
Simply reserve online and pay at the counter when you collect. Available in shop from just two hours, subject to availability.
Thank you for your reservation
Your order is now being processed and we have sent a confirmation email to you at
When will my order be ready to collect?
Following the initial email, you will be contacted by the shop to confirm that your item is available for collection.
Call us on or send us an email at
Unfortunately there has been a problem with your order
Please try again or alternatively you can contact your chosen shop on or send us an email at