Micromachined Resonant Devices: Design of Micromechanical Devices - MEMS Reference Shelf PREL 230 (Hardback)
  • Micromachined Resonant Devices: Design of Micromechanical Devices - MEMS Reference Shelf PREL 230 (Hardback)

Micromachined Resonant Devices: Design of Micromechanical Devices - MEMS Reference Shelf PREL 230 (Hardback)

£71.22
Hardback Published: 01/02/2009
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Micromachined resonant devices are of great interest for a wide variety of applications, such as inertial sensing, biological/chemical sensing, projection display, biomedical imaging, wireless communication, and instrumentation in micro/nano-technology. "Micromachined Resonant Devices: Design, Modeling, and Simulation" provides a comprehensive and in-depth description of the design, modeling, and simulation of micromachined resonant devices from basic structural components, integrated transducers, to electromechanical system-level models, and including, Optical MEMS, RF MEMS, BioMEMS, and inertial sensing.

Publisher: Springer-Verlag New York Inc.
ISBN: 9780387462790

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