Micromachined Devices and Components-V. 4 (Paperback)
  • Micromachined Devices and Components-V. 4 (Paperback)
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Micromachined Devices and Components-V. 4 (Paperback)

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£109.00
Paperback 448 Pages / Published: 31/05/1999
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An assessment of micromachined devices and components. It contains discussion of bonding and packaging, including wafer bonding with an adhesive coating, and examination of chemical and gas sensors, including acoustic-wave chemical microsensors in GaAs.

Publisher: SPIE Press
ISBN: 9780819429735
Number of pages: 448

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