Microelectronic Test Structures (Hardback)Alan J. Walton (author)
Hardback 250 Pages / Published: 01/12/1998
- Not available
Test structures are a crucial part of the manufacture of microelectronics, relaying information on the success of manufacturing processes and on process yield. Sophisticated test structures are now a part of every semiconductor wafer. This book serves as both a text and a professional's reference, detailing the types of structures needed to extract different types of information and providing a guide to parameter extraction, test structure design, and the analysis of the resulting data.
Publisher: Kluwer Academic Publishers Group
Number of pages: 250
Weight: 333 g
Dimensions: 229 x 153 mm
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