Micro Electro Mechanical Systems: MEMS International Conference 12th (Paperback)Institute of Electrical and Electronics Engineers (author)
Paperback 600 Pages / Published: 28/02/1999
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This is a collection of papers from the International Micro Electro Mechanical Systems Conference. Topics covered include; applied devices; optical applications; fluids; fabrication technologies; actuators; packaging technologies; design and modeling; and material properties.
Number of pages: 600
Edition: 1999, 12th International ed.
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