For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Number of pages: 519
Weight: 1115 g
Dimensions: 235 x 155 x 28 mm
Edition: Softcover reprint of the original 1st ed. 201
"The book is clearly written and easy to read. The various topics are balanced and well organized. ... The numerous figures and schematics are the most useful tools of the book. ... It is useful to students and newcomers, but also experts may find it a good reference because there are some useful aspects not easily found in other books ... . the book offers a good opportunity to go through the basic semiconductor fabrication technologies." (Rosaria A. Puglisi, MRS Bulletin, Vol. 40, October, 2015)
"Provide an excellent summary and explanation for nearly every micro and nano fabrication subject that readers could possibly be interested in learning about. ... this work is useful as an instructional aid with comprehension questions at the end of each chapter, as well as a chapter that contains a start-to-finish example of device fabrication. ... Summing Up: Recommended. Lower- and upper-division undergraduates, graduate students, and two-year technical program students." (N. M. Fahrenkopf, Choice, Vol. 52 (12), August, 2015)
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