The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.
The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:Thin-film integrated passives as an alternative to discrete passivesThe possibility of piezoelectric MEMSSolutions for MEMS gyroscopesAdvanced interconnect technologiesAmbient energy harvestingBulk acoustic wave resonatorsUltrasonic receiver arrays using MEMS sensorsOptical MEMS-based spectrometersThe integration of MEMS resonators with conventional circuitryA wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patternsWireless microactuators to enable implantable MEMS devices for drug deliveryMEMS technologies for tactile sensing and actuation in roboticsMEMS-based micro hot-plate devicesInertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoringSensors using passive acousto-electric devices in wired and wireless systems
Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Publisher: Taylor & Francis Ltd
Number of pages: 478
Weight: 889 g
Dimensions: 248 x 171 mm
"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."
-Boris Stoeber, The University of British Columbia, Vancouver, Canada