This video tutorial focuses on silicon microelectromechanical systems (MEMS) performance and reliability. This video covers how to make valid performance and reliability measurements and their relationship to some specific design issues, addressing design, performance and reliability of MEMS together. It provides a brief overview of silicon-based technologies for those unfamiliar with the field. Both silicon actuators and sensors are addressed. Three professionals, along with a panel of experts, cover developments in this growing field. In the panel discussion, MEMS experts discuss the history and future of the challenges and opportunities in the MEMS area from an industry, university, and government perspective. This set also includes a CD-ROM that contains four related IEEE conference proceeding excerpts, a bibliography, and web links to related sites.Several technologies are currently used to implement MEMS. Surface silicon micromachining (SMM) produces thin but fully assembled microsystems. This technology is used to produce accelerometers (such as the highly successful series by Anolog Devices used to sense the need to deploy car airbags) and other complex actuation-based microsystems. It is produced using many of the processes developed for use in traditional CMOS fabrication lines and thus allows integration of microelectronics with MEMS. As reliability as a discipline only truly applies to devices produced in quantity and as SMM allows this and easy integration with CMOS, this video tutorial focuses on this technology.Experience with traditional CMOS fabrication technologies would be an asset, but is not strictly required to understand the material. Likewise, knowledge ofbasic college math as well as some statistical concepts would be useful to the viewer. This video will interest reliability, technology, designer, and product engineers and managers.
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