Mechanical Properties of Thick Polycrystalline Silicon Films Suitable for Surface Micromachining - Berichte aus der Elektrotechnik (Paperback)
  • Mechanical Properties of Thick Polycrystalline Silicon Films Suitable for Surface Micromachining - Berichte aus der Elektrotechnik (Paperback)
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Mechanical Properties of Thick Polycrystalline Silicon Films Suitable for Surface Micromachining - Berichte aus der Elektrotechnik (Paperback)

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£29.67
Paperback Published: 22/10/1999
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Publisher: Shaker Verlag GmbH, Germany
ISBN: 9783826565946
Dimensions: 205 x 145 mm

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