Lithography (Hardback)
Stefan Landis (editor)
£134.00
Hardback
404 Pages /
Published: 19/11/2010
- We can order this from the publisher
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Publisher: ISTE Ltd and John Wiley & Sons Inc
ISBN: 9781848212022
Number of pages: 404
Weight: 740 g
Dimensions: 236 x 163 x 28 mm
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