International Conference on Microelectronic Test Structures 1998 (Paperback)Institute of Electrical and Electronics Engineers (author)
Paperback 272 Pages / Published: 01/07/1998
- Not available
The papers from this international conference cover advances in developments and future directions on all microelectronic test structures and their applications for characterization of device matching, critical dimension, parameter extraction, yield reliability, and interconnection.
Number of pages: 272
Dimensions: 279 x 216 mm
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