International Conference on Microelectronic Test Structures 1996 (Paperback)Institute of Electrical and Electronics Engineers (author)
Paperback 313 Pages / Published: 31/03/1996
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This international conference covers advances in recent developments and future directions on all microelectronic test structures and their applications for characterisation of device matching, critical dimension, parameter extraction, yield reliability, and interconnection.
Number of pages: 313
Weight: 953 g
Dimensions: 298 x 216 mm
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