Influence of the Plasma Chemistry and Energetics on the Composition and Structure Evolution of Sputtered Oxide Thin Films - Materials Chemistry v. 2006, 7 (Paperback)Stanislav Mraz (author)
Paperback Published: 06/10/2006
- Not available
Publisher: Shaker Verlag GmbH, Germany
Dimensions: 210 x 148 mm
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