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In-Line Characterization Techniques For Performance and Yield Enhancement In Microelectronic Manufacturing Ii- (Paperback)Ajuria (author)
Paperback 254 Pages / Published: 30/09/1998
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A collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and em-wave techniques; and surface photovoltage techniques.
Publisher: SPIE Press
Number of pages: 254
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