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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography - Press Monographs (Paperback)
  • Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography - Press Monographs (Paperback)
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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography - Press Monographs (Paperback)

(author)
£122.00
Paperback 776 Pages / Published: 30/03/1997
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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Publisher: SPIE Press
ISBN: 9780819497864
Number of pages: 776
Dimensions: 229 x 152 mm

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