Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications - Springer Series in Electronics and Photonics v. 34 (Hardback)
  • Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications - Springer Series in Electronics and Photonics v. 34 (Hardback)
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Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications - Springer Series in Electronics and Photonics v. 34 (Hardback)

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£72.00
Hardback Published: 28/10/1997
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Gate Dielectrics focusses on dielectric films satisfying the superior quality gate dielectric even in large-scale integration. The information presented is rather up to date with regard to nanometer-range ultrathin gate-dielectric films, which are indispensible for submicrometer ULSIs.

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN: 9783540631828
Weight: 700 g
Dimensions: 235 x 155 x 21 mm

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