Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices - Nato Science Partnership Subseries: 3 47 (Hardback)
  • Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices - Nato Science Partnership Subseries: 3 47 (Hardback)
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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices - Nato Science Partnership Subseries: 3 47 (Hardback)

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£159.99
Hardback 507 Pages / Published: 31/03/1998
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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of

Publisher: Springer
ISBN: 9780792350071
Number of pages: 507
Weight: 962 g
Dimensions: 244 x 170 x 28 mm
Edition: 1998 ed.

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