Fluid Management in Immersion and Imprint Microlithography (Paperback)
  • Fluid Management in Immersion and Imprint Microlithography (Paperback)
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Fluid Management in Immersion and Imprint Microlithography (Paperback)

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£59.00
Paperback Published: 01/05/2012
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Publisher: Proquest, Umi Dissertation Publishing
ISBN: 9781248956366
Weight: 299 g
Dimensions: 254 x 203 x 9 mm

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