These proceedings focus on the physical basis and underlying theory of electron optics and analysis. The theme of the conference was advances in images and analysis with electrons and other focussed probes. Topics covered included conventional electron optics and analysis, secondary ion mass spectroscopy, scanning Auger spectroscopy, x-ray microscopy, acoustic microscopy and lithography.
Publisher: Taylor & Francis Ltd
Number of pages: 253
Weight: 16 g
Dimensions: 230 x 150 mm
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