This book covers a wide spectrum of issues ranging from fundamental electrochemical processes to their applications in micro- and nanofabrication, microanalyses, microsensing, and their interaction with inorganic surfaces and biological systems. The editors provide comprehensive background to unique processes, such as the technological development of miniaturization, microfabrication, thin film deposition, etching, cleaning, planarization, and silicon processing technologies to introduce a wide range of applications in context.
More than 40 internationally recognized industry, research, and medical experts provide insight on the current status and future trends in their fields. They also highlight the impact of applying electrochemical microsystem technologies on industries such as storage and packaging; microelectronics, sensors, and portable electronics; machining, polishing, anodization, and plating technologies in heavy industries; biosensing, biological implant technology, and neurobiology; and cross-disciplinary integrated systems.
Electrochemical Microsystem Technologies is a valuable reference for graduate/postgraduate students, technologists, and researchers working in the field of electrochemical technology.
Publisher: Taylor & Francis Ltd
Number of pages: 588
Weight: 953 g
Dimensions: 229 x 152 x 31 mm