Development and Advanced Characterization of Novel Chemically Amplified Resists for Next Generation Lithography (Paperback)
  • Development and Advanced Characterization of Novel Chemically Amplified Resists for Next Generation Lithography (Paperback)
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Development and Advanced Characterization of Novel Chemically Amplified Resists for Next Generation Lithography (Paperback)

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£59.00
Paperback Published: 01/09/2011
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Publisher: Proquest, Umi Dissertation Publishing
ISBN: 9781243709042
Weight: 599 g
Dimensions: 254 x 203 x 20 mm

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