Defects in Microelectronic Materials and Devices (Hardback)
  • Defects in Microelectronic Materials and Devices (Hardback)
zoom

Defects in Microelectronic Materials and Devices (Hardback)

(editor), (editor)
£160.00
Hardback 770 Pages / Published: 19/11/2008
  • We can order this

Usually dispatched within 3 weeks

  • This item has been added to your basket

Uncover the Defects that Compromise Performance and Reliability
As microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes required to produce them.





A comprehensive survey of defects that occur in silicon-based metal-oxide semiconductor field-effect transistor (MOSFET) technologies, this book also discusses flaws in linear bipolar technologies, silicon carbide-based devices, and gallium arsenide materials and devices. These defects can profoundly affect the yield, performance, long-term reliability, and radiation response of microelectronic devices and integrated circuits (ICs). Organizing the material to build understanding of the problems and provide a quick reference for scientists, engineers and technologists, this text reviews yield- and performance-limiting defects and impurities in the device silicon layer, in the gate insulator, and/or at the critical Si/SiO2 interface. It then examines defects that impact production yield and long-term reliability, including:









Vacancies, interstitials, and impurities (especially hydrogen)





Negative bias temperature instabilities





Defects in ultrathin oxides (SiO2 and silicon oxynitride)





Take A Proactive Approach
The authors condense decades of experience and perspectives of noted experimentalists and theorists to characterize defect properties and their impact on microelectronic devices. They identify the defects, offering solutions to avoid them and methods to detect them. These include the use of 3-D imaging, as well as electrical, analytical, computational, spectroscopic, and state-of-the-art microscopic methods. This book is a valuable look at challenges to come from emerging

Publisher: Taylor & Francis Inc
ISBN: 9781420043761
Number of pages: 770
Weight: 1497 g
Dimensions: 254 x 178 x 41 mm

You may also be interested in...

Cybernetics
Added to basket
£8.50
Paperback
Temporary Power Systems
Added to basket
The Oxford Solid State Basics
Added to basket
3D Printing with Autodesk
Added to basket
Electronics For Dummies
Added to basket
The Lego Mindstorms Ev3 Idea Book
Added to basket
Exploring Arduino
Added to basket
£26.99
Paperback
Arduino Workshop
Added to basket
£24.99
Paperback
Make: Analog Synthesizers
Added to basket
RF Circuit Design
Added to basket
The Lego Mindstorms Ev3 Discovery Book
Added to basket

Please sign in to write a review

Your review has been submitted successfully.