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Control of Molecular Contaminants in Porous Low-K Dielectric Films and in Uhp Gas Delivery Systems (Paperback)
  • Control of Molecular Contaminants in Porous Low-K Dielectric Films and in Uhp Gas Delivery Systems (Paperback)
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Control of Molecular Contaminants in Porous Low-K Dielectric Films and in Uhp Gas Delivery Systems (Paperback)

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£59.00
Paperback Published: 01/05/2012
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Publisher: Proquest, Umi Dissertation Publishing
ISBN: 9781248992234
Weight: 844 g
Dimensions: 254 x 203 x 28 mm

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