Chemical-Mechanical Planarization: Volume 767 - MRS Proceedings (Paperback)
  • Chemical-Mechanical Planarization: Volume 767 - MRS Proceedings (Paperback)
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Chemical-Mechanical Planarization: Volume 767 - MRS Proceedings (Paperback)

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£22.00
Paperback Published: 05/06/2014
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Chemical-mechanical planarization (CMP) has emerged as a critical fabrication technology for advanced integrated circuits. Even as the applications of CMP have diversified and we have begun to understand aspects of the physics and chemistry of the process, a new generation of CMP innovations is unfolding. New slurries and consumables are under development. New applications to novel devices continue to appear. This book, the most recent in a successful series on CMP, offers a review of the advances to date and provides a comprehensive discussion of the future challenges that must be overcome. Presentations from academia, government labs and industry are featured. Topics include; CMP modeling; CMP science; CMP slurries and particles for planarization of copper, oxide, and other materials; planarization applications including shallow trench isolation (STI), copper damascene, and novel devices and CMP integration.

Publisher: Cambridge University Press
ISBN: 9781107409415
Weight: 490 g
Dimensions: 229 x 152 x 19 mm

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