International Conference on Microelectronic Test Structures 1998 (Paperback)

by Institute of Electrical and Electronics Engineers

Format: Paperback 272 pages

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The papers from this international conference cover advances in developments and future directions on all microelectronic test structures and their applications for characterization of device matching, critical dimension, parameter extraction, yield reliability, and interconnection.

Book details

Published
30/11/1998

Publisher
I.E.E.E.Press

ISBN
9780780343481


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